Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate
A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/1/42 |
| _version_ | 1797438631402536960 |
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| author | Tsuyoshi Tsukada Ryusei Takigawa Yoshihiro Hasegawa Muhammad Salman Al Farisi Mitsuhiro Shikida |
| author_facet | Tsuyoshi Tsukada Ryusei Takigawa Yoshihiro Hasegawa Muhammad Salman Al Farisi Mitsuhiro Shikida |
| author_sort | Tsuyoshi Tsukada |
| collection | DOAJ |
| description | A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed at the center of the tube. The signal lines were simultaneously formed and connected to the Cu layer of the substrate during the fabrication of the sensing structure, thus simplifying the electrical connection process. Finally, by rolling the fabricated sensor substrate, the flow sensor device itself was transformed into a circular tube structure, which defined the airflow region. By implementing several slits on the substrate, the sensing element was successfully placed at the center of the tube where the flow velocity is maximum. Compared to the conventional sensor structure in which the sensor was placed on the inner wall surface of the tube, the sensitivity of the sensor was doubled. |
| first_indexed | 2024-03-09T11:40:51Z |
| format | Article |
| id | doaj.art-027800b1d64641b983c990d2a5d1ff2f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T11:40:51Z |
| publishDate | 2022-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-027800b1d64641b983c990d2a5d1ff2f2023-11-30T23:32:25ZengMDPI AGMicromachines2072-666X2022-12-011414210.3390/mi14010042Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide SubstrateTsuyoshi Tsukada0Ryusei Takigawa1Yoshihiro Hasegawa2Muhammad Salman Al Farisi3Mitsuhiro Shikida4Department of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, JapanDepartment of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, JapanDepartment of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, JapanDepartment of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, JapanDepartment of Biomedical Information Sciences, Hiroshima City University, Hiroshima 731-3194, JapanA tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed at the center of the tube. The signal lines were simultaneously formed and connected to the Cu layer of the substrate during the fabrication of the sensing structure, thus simplifying the electrical connection process. Finally, by rolling the fabricated sensor substrate, the flow sensor device itself was transformed into a circular tube structure, which defined the airflow region. By implementing several slits on the substrate, the sensing element was successfully placed at the center of the tube where the flow velocity is maximum. Compared to the conventional sensor structure in which the sensor was placed on the inner wall surface of the tube, the sensitivity of the sensor was doubled.https://www.mdpi.com/2072-666X/14/1/42MEMSflow sensorCu on polyimide substratesensor integration |
| spellingShingle | Tsuyoshi Tsukada Ryusei Takigawa Yoshihiro Hasegawa Muhammad Salman Al Farisi Mitsuhiro Shikida Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate Micromachines MEMS flow sensor Cu on polyimide substrate sensor integration |
| title | Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate |
| title_full | Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate |
| title_fullStr | Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate |
| title_full_unstemmed | Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate |
| title_short | Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate |
| title_sort | sensitivity enhancement of tube integrated mems flow sensor using flexible copper on polyimide substrate |
| topic | MEMS flow sensor Cu on polyimide substrate sensor integration |
| url | https://www.mdpi.com/2072-666X/14/1/42 |
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