Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate

Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate

A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed...

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Bibliographic Details
Main Authors: Tsuyoshi Tsukada, Ryusei Takigawa, Yoshihiro Hasegawa, Muhammad Salman Al Farisi, Mitsuhiro Shikida
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
MEMS
flow sensor
Cu on polyimide substrate
sensor integration
Online Access:https://www.mdpi.com/2072-666X/14/1/42

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