Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces

The capability of tailoring the resonance wavelength of metasurfaces is important as it can alleviate the manufacturing precision required to produce the exact structure according to the design of the nanoresonators. Tuning of Fano resonances by applying heat has been theoretically predicted in the...

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Main Authors: Athira Kuppadakkath, Ángela Barreda, Lilit Ghazaryan, Tobias Bucher, Kirill Koshelev, Thomas Pertsch, Adriana Szeghalmi, Duk Choi, Isabelle Staude, Falk Eilenberger
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/13/11/1810
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author Athira Kuppadakkath
Ángela Barreda
Lilit Ghazaryan
Tobias Bucher
Kirill Koshelev
Thomas Pertsch
Adriana Szeghalmi
Duk Choi
Isabelle Staude
Falk Eilenberger
author_facet Athira Kuppadakkath
Ángela Barreda
Lilit Ghazaryan
Tobias Bucher
Kirill Koshelev
Thomas Pertsch
Adriana Szeghalmi
Duk Choi
Isabelle Staude
Falk Eilenberger
author_sort Athira Kuppadakkath
collection DOAJ
description The capability of tailoring the resonance wavelength of metasurfaces is important as it can alleviate the manufacturing precision required to produce the exact structure according to the design of the nanoresonators. Tuning of Fano resonances by applying heat has been theoretically predicted in the case of silicon metasurfaces. Here, we experimentally demonstrate the permanent tailoring of quasi-bound states in the continuum (quasi-BIC) resonance wavelength in an a-Si:H metasurface and quantitatively analyze the modification in the <i>Q</i>-factor with gradual heating. A gradual increment in temperature leads to a spectral shift in the resonance wavelength. With the support of ellipsometry measurements, the spectral shift resulting from the short-duration (ten minutes) heating is identified to be due to refractive index variations in the material rather than a geometric effect or amorphous/polycrystalline phase transition. In the case of quasi-BIC modes in the near-infrared, resonance wavelength could be adjusted from T = 350 °C to T = 550 °C without affecting the <i>Q</i>-factor considerably. Apart from the temperature-induced resonance trimming, large <i>Q</i>-factors can be attained at the highest analyzed temperature (T = 700 °C) in the near-infrared quasi-BIC modes. Resonance tailoring is just one of the possible applications of our results. We expect that our study is also insightful in the design of a-Si:H metasurfaces where large <i>Q</i>-factors are required at high temperatures.
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spelling doaj.art-02812a81c7474c9894e7456ad99ac5e62023-11-18T08:19:49ZengMDPI AGNanomaterials2079-49912023-06-011311181010.3390/nano13111810Precision Tailoring Quasi-BIC Resonance of a-Si:H MetasurfacesAthira Kuppadakkath0Ángela Barreda1Lilit Ghazaryan2Tobias Bucher3Kirill Koshelev4Thomas Pertsch5Adriana Szeghalmi6Duk Choi7Isabelle Staude8Falk Eilenberger9Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyResearch School of Physics, Australian National University, Canberra, ACT 2601, AustraliaInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyResearch School of Physics, Australian National University, Canberra, ACT 2601, AustraliaInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, GermanyThe capability of tailoring the resonance wavelength of metasurfaces is important as it can alleviate the manufacturing precision required to produce the exact structure according to the design of the nanoresonators. Tuning of Fano resonances by applying heat has been theoretically predicted in the case of silicon metasurfaces. Here, we experimentally demonstrate the permanent tailoring of quasi-bound states in the continuum (quasi-BIC) resonance wavelength in an a-Si:H metasurface and quantitatively analyze the modification in the <i>Q</i>-factor with gradual heating. A gradual increment in temperature leads to a spectral shift in the resonance wavelength. With the support of ellipsometry measurements, the spectral shift resulting from the short-duration (ten minutes) heating is identified to be due to refractive index variations in the material rather than a geometric effect or amorphous/polycrystalline phase transition. In the case of quasi-BIC modes in the near-infrared, resonance wavelength could be adjusted from T = 350 °C to T = 550 °C without affecting the <i>Q</i>-factor considerably. Apart from the temperature-induced resonance trimming, large <i>Q</i>-factors can be attained at the highest analyzed temperature (T = 700 °C) in the near-infrared quasi-BIC modes. Resonance tailoring is just one of the possible applications of our results. We expect that our study is also insightful in the design of a-Si:H metasurfaces where large <i>Q</i>-factors are required at high temperatures.https://www.mdpi.com/2079-4991/13/11/1810quasi-BICdielectric metasurfacetailoring<i>Q</i>-factor
spellingShingle Athira Kuppadakkath
Ángela Barreda
Lilit Ghazaryan
Tobias Bucher
Kirill Koshelev
Thomas Pertsch
Adriana Szeghalmi
Duk Choi
Isabelle Staude
Falk Eilenberger
Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
Nanomaterials
quasi-BIC
dielectric metasurface
tailoring
<i>Q</i>-factor
title Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
title_full Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
title_fullStr Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
title_full_unstemmed Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
title_short Precision Tailoring Quasi-BIC Resonance of a-Si:H Metasurfaces
title_sort precision tailoring quasi bic resonance of a si h metasurfaces
topic quasi-BIC
dielectric metasurface
tailoring
<i>Q</i>-factor
url https://www.mdpi.com/2079-4991/13/11/1810
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