Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review
This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element m...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-06-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/12/3554 |
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| author | Dovydas Barauskas Mindaugas Dzikaras Dovydas Bieliauskas Donatas Pelenis Gailius Vanagas Darius Viržonis |
| author_facet | Dovydas Barauskas Mindaugas Dzikaras Dovydas Bieliauskas Donatas Pelenis Gailius Vanagas Darius Viržonis |
| author_sort | Dovydas Barauskas |
| collection | DOAJ |
| description | This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed. |
| first_indexed | 2024-03-10T18:55:56Z |
| format | Article |
| id | doaj.art-03697215bbca483d8969321ac8f22a85 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T18:55:56Z |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-03697215bbca483d8969321ac8f22a852023-11-20T04:43:16ZengMDPI AGSensors1424-82202020-06-012012355410.3390/s20123554Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A ReviewDovydas Barauskas0Mindaugas Dzikaras1Dovydas Bieliauskas2Donatas Pelenis3Gailius Vanagas4Darius Viržonis5Kaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaKaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaKaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaKaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaKaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaKaunas University of Technology, Panevėžys Institute of Technologies and Business, LT-37164 Panevėžys, LithuaniaThis review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.https://www.mdpi.com/1424-8220/20/12/3554Capacitive Micromachined Ultrasound Transducergas sensingmolecule sensingMicro Electro Mechanical Systemmicrofabricationfinite element modeling |
| spellingShingle | Dovydas Barauskas Mindaugas Dzikaras Dovydas Bieliauskas Donatas Pelenis Gailius Vanagas Darius Viržonis Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review Sensors Capacitive Micromachined Ultrasound Transducer gas sensing molecule sensing Micro Electro Mechanical System microfabrication finite element modeling |
| title | Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review |
| title_full | Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review |
| title_fullStr | Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review |
| title_full_unstemmed | Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review |
| title_short | Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review |
| title_sort | selective ultrasonic gravimetric sensors based on capacitive micromachined ultrasound transducer structure a review |
| topic | Capacitive Micromachined Ultrasound Transducer gas sensing molecule sensing Micro Electro Mechanical System microfabrication finite element modeling |
| url | https://www.mdpi.com/1424-8220/20/12/3554 |
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