Mechanical and Thermal Properties of W-Ta-B Coatings Deposited by High-Power Impulse Magnetron Sputtering (HiPIMS)

We present the deposition and characterization of tungsten-tantalum diboride (W,Ta)B<sub>2</sub> coatings prepared by the high-power impulse magnetron sputtering technique. We evaluated the influence of pulse duration and substrate bias on the properties of (W,Ta)B<sub>2</sub>...

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Bibliographic Details
Main Authors: Rafał Psiuk, Tomasz Mościcki, Justyna Chrzanowska-Giżyńska, Łukasz Kurpaska, Joanna Radziejewska, Piotr Denis, Dariusz Garbiec, Marcin Chmielewski
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/2/664
Description
Summary:We present the deposition and characterization of tungsten-tantalum diboride (W,Ta)B<sub>2</sub> coatings prepared by the high-power impulse magnetron sputtering technique. We evaluated the influence of pulse duration and substrate bias on the properties of (W,Ta)B<sub>2</sub> films. A high hardness of up to 35 GPa measured by nanoindentation was simultaneously obtained with good elastic properties. Changing the pulse duration greatly affected the B/(W+Ta) atomic ratio, which influenced the properties of the coatings. The deposited films are thermally stable at up to 1000 °C in vacuum and are able to withstand oxidation at 500 °C.
ISSN:1996-1944