Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si
In the research field of energy storage dielectrics, the “responsivity” parameter, defined as the recyclable/recoverable energy density per unit electric field, has become critically important for a comprehensive evaluation of the energy storage capability of a dielectric. In this work, high recycla...
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| Format: | Article |
| Language: | English |
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Tsinghua University Press
2024-02-01
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| Series: | Journal of Advanced Ceramics |
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| Online Access: | https://www.sciopen.com/article/10.26599/JAC.2024.9220841 |
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| author | Jun Ouyang Yinxiu Xue Chuanqi Song Meiling Yuan Kun Wang Yuyao Zhao Hongbo Cheng Hanfei Zhu Chao Liu |
| author_facet | Jun Ouyang Yinxiu Xue Chuanqi Song Meiling Yuan Kun Wang Yuyao Zhao Hongbo Cheng Hanfei Zhu Chao Liu |
| author_sort | Jun Ouyang |
| collection | DOAJ |
| description | In the research field of energy storage dielectrics, the “responsivity” parameter, defined as the recyclable/recoverable energy density per unit electric field, has become critically important for a comprehensive evaluation of the energy storage capability of a dielectric. In this work, high recyclable energy density and responsivity, i.e., Wrec = 161.1 J·cm–3 and ξ = 373.8 J·(kV·m2)–1, have been simultaneously achieved in a prototype perovskite dielectric, BaTiO3, which is integrated on Si at 500 ℃ in the form of a submicron thick film. This ferroelectric film features a multi-scale polar structure consisting of ferroelectric grains with different orientations and inner-grain ferroelastic domains. A LaNiO3 buffer layer is used to induce a {001} textured, columnar nanograin microstructure, while an elevated deposition temperature promotes lateral growth of the nanograins (in-plane diameter increases from ~10–20 nm at lower temperatures to ~30 nm). These preferably oriented and periodically regulated nanograins have resulted in a small remnant polarization and a delayed polarization saturation in the film’s P–E behavior, leading to a high recyclable energy density. Meanwhile, an improved polarizability/dielectric constant of the BaTiO3 film has produced a much larger maximum polarization than those deposited at lower temperatures at the same electric field, leading to a record-breaking responsivity for this simple perovskite. |
| first_indexed | 2024-04-24T22:06:27Z |
| format | Article |
| id | doaj.art-03be5d6c591049718e7af87300f6f6b5 |
| institution | Directory Open Access Journal |
| issn | 2226-4108 2227-8508 |
| language | English |
| last_indexed | 2024-04-24T22:06:27Z |
| publishDate | 2024-02-01 |
| publisher | Tsinghua University Press |
| record_format | Article |
| series | Journal of Advanced Ceramics |
| spelling | doaj.art-03be5d6c591049718e7af87300f6f6b52024-03-20T11:12:30ZengTsinghua University PressJournal of Advanced Ceramics2226-41082227-85082024-02-0113219820610.26599/JAC.2024.9220841Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on SiJun Ouyang0Yinxiu Xue1Chuanqi Song2Meiling Yuan3Kun Wang4Yuyao Zhao5Hongbo Cheng6Hanfei Zhu7Chao Liu8Institute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaSchool of Materials Science and Engineering, Shandong University, Jinan 250061, ChinaSchool of Materials Science and Engineering, Shandong University, Jinan 250061, ChinaSchool of Materials Science and Engineering, Shandong University, Jinan 250061, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaInstitute of Advanced Energy Materials and Chemistry, School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, ChinaIn the research field of energy storage dielectrics, the “responsivity” parameter, defined as the recyclable/recoverable energy density per unit electric field, has become critically important for a comprehensive evaluation of the energy storage capability of a dielectric. In this work, high recyclable energy density and responsivity, i.e., Wrec = 161.1 J·cm–3 and ξ = 373.8 J·(kV·m2)–1, have been simultaneously achieved in a prototype perovskite dielectric, BaTiO3, which is integrated on Si at 500 ℃ in the form of a submicron thick film. This ferroelectric film features a multi-scale polar structure consisting of ferroelectric grains with different orientations and inner-grain ferroelastic domains. A LaNiO3 buffer layer is used to induce a {001} textured, columnar nanograin microstructure, while an elevated deposition temperature promotes lateral growth of the nanograins (in-plane diameter increases from ~10–20 nm at lower temperatures to ~30 nm). These preferably oriented and periodically regulated nanograins have resulted in a small remnant polarization and a delayed polarization saturation in the film’s P–E behavior, leading to a high recyclable energy density. Meanwhile, an improved polarizability/dielectric constant of the BaTiO3 film has produced a much larger maximum polarization than those deposited at lower temperatures at the same electric field, leading to a record-breaking responsivity for this simple perovskite.https://www.sciopen.com/article/10.26599/JAC.2024.9220841energy storageenergy densityresponsivitybatio3dielectric capacitorsi |
| spellingShingle | Jun Ouyang Yinxiu Xue Chuanqi Song Meiling Yuan Kun Wang Yuyao Zhao Hongbo Cheng Hanfei Zhu Chao Liu Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si Journal of Advanced Ceramics energy storage energy density responsivity batio3 dielectric capacitor si |
| title | Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si |
| title_full | Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si |
| title_fullStr | Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si |
| title_full_unstemmed | Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si |
| title_short | Simultaneously achieving high energy density and responsivity in submicron BaTiO3 film capacitors integrated on Si |
| title_sort | simultaneously achieving high energy density and responsivity in submicron batio3 film capacitors integrated on si |
| topic | energy storage energy density responsivity batio3 dielectric capacitor si |
| url | https://www.sciopen.com/article/10.26599/JAC.2024.9220841 |
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