Micromachined Thermal Flow Sensors—A Review
Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry,...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2012-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/3/3/550 |
| _version_ | 1818351860439842816 |
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| author | Jonathan T. W. Kuo Ellis Meng Lawrence Yu |
| author_facet | Jonathan T. W. Kuo Ellis Meng Lawrence Yu |
| author_sort | Jonathan T. W. Kuo |
| collection | DOAJ |
| description | Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, <em>etc.</em> This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included. |
| first_indexed | 2024-12-13T18:44:27Z |
| format | Article |
| id | doaj.art-03fa850be0f14097a6267901223b065f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-13T18:44:27Z |
| publishDate | 2012-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-03fa850be0f14097a6267901223b065f2022-12-21T23:35:06ZengMDPI AGMicromachines2072-666X2012-07-013355057310.3390/mi3030550Micromachined Thermal Flow Sensors—A ReviewJonathan T. W. KuoEllis MengLawrence YuMicrofabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, <em>etc.</em> This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.http://www.mdpi.com/2072-666X/3/3/550MEMSthermal flow sensorsTCRanemometrythermoresistivethermoelectricthermoelectronicfrequency analoggas flowfluid flow |
| spellingShingle | Jonathan T. W. Kuo Ellis Meng Lawrence Yu Micromachined Thermal Flow Sensors—A Review Micromachines MEMS thermal flow sensors TCR anemometry thermoresistive thermoelectric thermoelectronic frequency analog gas flow fluid flow |
| title | Micromachined Thermal Flow Sensors—A Review |
| title_full | Micromachined Thermal Flow Sensors—A Review |
| title_fullStr | Micromachined Thermal Flow Sensors—A Review |
| title_full_unstemmed | Micromachined Thermal Flow Sensors—A Review |
| title_short | Micromachined Thermal Flow Sensors—A Review |
| title_sort | micromachined thermal flow sensors a review |
| topic | MEMS thermal flow sensors TCR anemometry thermoresistive thermoelectric thermoelectronic frequency analog gas flow fluid flow |
| url | http://www.mdpi.com/2072-666X/3/3/550 |
| work_keys_str_mv | AT jonathantwkuo micromachinedthermalflowsensorsareview AT ellismeng micromachinedthermalflowsensorsareview AT lawrenceyu micromachinedthermalflowsensorsareview |