Micromachined Thermal Flow Sensors—A Review

Micromachined Thermal Flow Sensors—A Review

Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry,...

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Bibliographic Details
Main Authors: Jonathan T. W. Kuo, Ellis Meng, Lawrence Yu
Format: Article
Language:English
Published: MDPI AG 2012-07-01
Series:Micromachines
Subjects:
MEMS
thermal flow sensors
TCR
anemometry
thermoresistive
thermoelectric
thermoelectronic
frequency analog
gas flow
fluid flow
Online Access:http://www.mdpi.com/2072-666X/3/3/550

Internet

http://www.mdpi.com/2072-666X/3/3/550

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