Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source
This article presents the calculation results on the conversion efficiency (CE) of 1.064 μm laser-produced plasmas (LPPs) extreme-ultraviolet (EUV) tin (Sn) light sources with the Gaussian and a triangular-flat-topped like laser pulse temporal shapes. The computational model includes a collisional-r...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Elsevier
2019-12-01
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| Series: | Physics Open |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666032619300031 |
| _version_ | 1818038233052741632 |
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| author | Majid Masnavi Homaira Parchamy |
| author_facet | Majid Masnavi Homaira Parchamy |
| author_sort | Majid Masnavi |
| collection | DOAJ |
| description | This article presents the calculation results on the conversion efficiency (CE) of 1.064 μm laser-produced plasmas (LPPs) extreme-ultraviolet (EUV) tin (Sn) light sources with the Gaussian and a triangular-flat-topped like laser pulse temporal shapes. The computational model includes a collisional-radiative model and 1D hydrodynamics code that predicts reported experimental and theoretical results on the CE of 1.064 μm and 10.6 μm LPP EUV sources with the planar and mass-limited spherical Sn targets. The calculations for the case of a spherical target reveal that an optimum triangular-flat-topped like laser pulse generates a higher CE compared to the Gaussian pulse, especially, for the longer laser pulse duration than ≈ 30 ns. The study demonstrated that a rising intensity rate of the laser pulse has a vital role to optimize the CE as well as to prolong the in-band (13.5 ± 0.135 nm) spectral emission of a small Sn spherical target. The model predicts a ≈ 30 ns rising time duration for a linearly increasing intensity of triangular-flat-topped 1.064 μm laser pulse is necessary to obtain a maximum CE with a typical ≈ 40 μm diameter liquid Sn droplet. |
| first_indexed | 2024-12-10T07:39:29Z |
| format | Article |
| id | doaj.art-0534ade4c6804a829e8a1f845f9889f4 |
| institution | Directory Open Access Journal |
| issn | 2666-0326 |
| language | English |
| last_indexed | 2024-12-10T07:39:29Z |
| publishDate | 2019-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Physics Open |
| spelling | doaj.art-0534ade4c6804a829e8a1f845f9889f42022-12-22T01:57:20ZengElsevierPhysics Open2666-03262019-12-011100003Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma sourceMajid Masnavi0Homaira Parchamy1Corresponding author.; The Department of Science, Valencia College, Orlando, FL, 32825, USAThe Department of Science, Valencia College, Orlando, FL, 32825, USAThis article presents the calculation results on the conversion efficiency (CE) of 1.064 μm laser-produced plasmas (LPPs) extreme-ultraviolet (EUV) tin (Sn) light sources with the Gaussian and a triangular-flat-topped like laser pulse temporal shapes. The computational model includes a collisional-radiative model and 1D hydrodynamics code that predicts reported experimental and theoretical results on the CE of 1.064 μm and 10.6 μm LPP EUV sources with the planar and mass-limited spherical Sn targets. The calculations for the case of a spherical target reveal that an optimum triangular-flat-topped like laser pulse generates a higher CE compared to the Gaussian pulse, especially, for the longer laser pulse duration than ≈ 30 ns. The study demonstrated that a rising intensity rate of the laser pulse has a vital role to optimize the CE as well as to prolong the in-band (13.5 ± 0.135 nm) spectral emission of a small Sn spherical target. The model predicts a ≈ 30 ns rising time duration for a linearly increasing intensity of triangular-flat-topped 1.064 μm laser pulse is necessary to obtain a maximum CE with a typical ≈ 40 μm diameter liquid Sn droplet.http://www.sciencedirect.com/science/article/pii/S2666032619300031Extreme-ultraviolet lithographyLaser-produced plasmasCollisional-radiative modelRadiation-hydrodynamicsHighly-charged tin spectra |
| spellingShingle | Majid Masnavi Homaira Parchamy Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source Physics Open Extreme-ultraviolet lithography Laser-produced plasmas Collisional-radiative model Radiation-hydrodynamics Highly-charged tin spectra |
| title | Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source |
| title_full | Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source |
| title_fullStr | Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source |
| title_full_unstemmed | Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source |
| title_short | Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source |
| title_sort | calculation of the extreme ultraviolet radiation conversion efficiency for a laser produced tin plasma source |
| topic | Extreme-ultraviolet lithography Laser-produced plasmas Collisional-radiative model Radiation-hydrodynamics Highly-charged tin spectra |
| url | http://www.sciencedirect.com/science/article/pii/S2666032619300031 |
| work_keys_str_mv | AT majidmasnavi calculationoftheextremeultravioletradiationconversionefficiencyforalaserproducedtinplasmasource AT homairaparchamy calculationoftheextremeultravioletradiationconversionefficiencyforalaserproducedtinplasmasource |