Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors...
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| Format: | Article |
| Language: | English |
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MDPI AG
2015-06-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/15/6/14745 |
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| author | Cheng-Hua Tsai Chun-Wei Tsai Hsu-Tang Chang Shih-Hsiang Liu Jui-Che Tsai |
| author_facet | Cheng-Hua Tsai Chun-Wei Tsai Hsu-Tang Chang Shih-Hsiang Liu Jui-Che Tsai |
| author_sort | Cheng-Hua Tsai |
| collection | DOAJ |
| description | Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively. |
| first_indexed | 2024-04-11T21:58:12Z |
| format | Article |
| id | doaj.art-0547511f8bd24f4fa5aa8d7499256e30 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:58:12Z |
| publishDate | 2015-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-0547511f8bd24f4fa5aa8d7499256e302022-12-22T04:01:02ZengMDPI AGSensors1424-82202015-06-01156147451475610.3390/s150614745s150614745Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-TypeCheng-Hua Tsai0Chun-Wei Tsai1Hsu-Tang Chang2Shih-Hsiang Liu3Jui-Che Tsai4These authors contributed equally to this work.Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, TaiwanGraduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, TaiwanGraduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, TaiwanGraduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, TaiwanThree different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.http://www.mdpi.com/1424-8220/15/6/14745microelectromechanical deviceselectrothermal effectssilicon on insulator |
| spellingShingle | Cheng-Hua Tsai Chun-Wei Tsai Hsu-Tang Chang Shih-Hsiang Liu Jui-Che Tsai Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type Sensors microelectromechanical devices electrothermal effects silicon on insulator |
| title | Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type |
| title_full | Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type |
| title_fullStr | Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type |
| title_full_unstemmed | Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type |
| title_short | Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type |
| title_sort | electrothermally actuated micromirrors with bimorph actuators bending type and torsion type |
| topic | microelectromechanical devices electrothermal effects silicon on insulator |
| url | http://www.mdpi.com/1424-8220/15/6/14745 |
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