Electrical and optical study of transparent V-based oxide semiconductors prepared by magnetron sputtering under different conditions

Electrical and optical study of transparent V-based oxide semiconductors prepared by magnetron sputtering under different conditions

This work is focused on structural, optical and electrical behaviors of vanadium-based oxide thin films prepared by magnetron sputtering under different conditions. Thin films have been deposited on glass substrates from metallic vanadium target at low sputtering pressure. Different working gases: a...

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Bibliographic Details
Main Authors: E. Prociow, M. Zielinski, K. Sieradzka, J. Domaradzki, D. Kaczmarek
Format: Article
Language:English
Published: Spolecnost pro radioelektronicke inzenyrstvi 2011-04-01
Series:Radioengineering
Subjects:
Magnetron sputtering
vanadium oxide
optical properties
electrical properties
Online Access:http://www.radioeng.cz/fulltexts/2011/11_01_204_208.pdf

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