Investigation and optimization of electron gun beam, based on simulation and experimental results
Nowadays, by expanding the application of thin layers in industry and medical sciences, their fabrication methods have also received attention. One of those methods is the vaporizing material method with the help of an electron gun. The most important part in the electron gun is the electron optic,...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2023-05-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | https://ijpr.iut.ac.ir/article_3371_437d9415ca534c36f0968612a0778f19.pdf |