TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES
Mesoscopic high aspect ratio ferroelectric tube structures of a diverse range of compositions with tailored physical properties can be used as key components in miniaturized flexible electronics, nano- and micro-electro-mechanical systems, nonvolatile FeRAM memories, and tunable photonic application...
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| Format: | Article |
| Language: | English |
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University of Chemistry and Technology, Prague
2012-09-01
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| Series: | Ceramics-Silikáty |
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| Online Access: | http://www.ceramics-silikaty.cz/2012/pdf/2012_03_177.pdf |
| _version_ | 1811234268581462016 |
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| author | VLADIMÍR KOVAĽ |
| author_facet | VLADIMÍR KOVAĽ |
| author_sort | VLADIMÍR KOVAĽ |
| collection | DOAJ |
| description | Mesoscopic high aspect ratio ferroelectric tube structures of a diverse range of compositions with tailored physical properties can be used as key components in miniaturized flexible electronics, nano- and micro-electro-mechanical systems, nonvolatile FeRAM memories, and tunable photonic applications. They are usually produced through advanced “bottom-up” or “topdown” fabrication techniques. In this study, a template wetting approach is employed for fabrication of Pb(Zr0.52Ti0.48)O3 (PZT) microtubes. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. Prior to crystallization at 750°C, free-standing tubes of a 2-μm outer diameter, extending to over 30 μm in length were released from the Si template using a selective isotropic-pulsed XeF2 reactive ion etching. To facilitate rapid electrical characterization and enable future integration process, directed positioning and aligning of the PZT tubes was performed by dielectrophoresis. The electric field-assisted technique involves an alternating electric voltage that is applied through pre-patterned microelectrodes to a colloidal suspension of PZT tubes dispersed in isopropyl alcohol. The most efficient biasing for the assembly of tubes across the electrode gap of 12 μm was a square wave signal of 5 Vrms and 10 Hz. By varying the applied frequency in between 1 and 10 Hz, an enhancement in tube alignment was obtained. |
| first_indexed | 2024-04-12T11:34:57Z |
| format | Article |
| id | doaj.art-06707b29001543c287c6a730ea88970f |
| institution | Directory Open Access Journal |
| issn | 0862-5468 1804-5847 |
| language | English |
| last_indexed | 2024-04-12T11:34:57Z |
| publishDate | 2012-09-01 |
| publisher | University of Chemistry and Technology, Prague |
| record_format | Article |
| series | Ceramics-Silikáty |
| spelling | doaj.art-06707b29001543c287c6a730ea88970f2022-12-22T03:34:52ZengUniversity of Chemistry and Technology, PragueCeramics-Silikáty0862-54681804-58472012-09-01563177186TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBESVLADIMÍR KOVAĽMesoscopic high aspect ratio ferroelectric tube structures of a diverse range of compositions with tailored physical properties can be used as key components in miniaturized flexible electronics, nano- and micro-electro-mechanical systems, nonvolatile FeRAM memories, and tunable photonic applications. They are usually produced through advanced “bottom-up” or “topdown” fabrication techniques. In this study, a template wetting approach is employed for fabrication of Pb(Zr0.52Ti0.48)O3 (PZT) microtubes. The method is based on repeated infiltration of precursor solution into macroporous silicon (Si) templates at a sub-atmospheric pressure. Prior to crystallization at 750°C, free-standing tubes of a 2-μm outer diameter, extending to over 30 μm in length were released from the Si template using a selective isotropic-pulsed XeF2 reactive ion etching. To facilitate rapid electrical characterization and enable future integration process, directed positioning and aligning of the PZT tubes was performed by dielectrophoresis. The electric field-assisted technique involves an alternating electric voltage that is applied through pre-patterned microelectrodes to a colloidal suspension of PZT tubes dispersed in isopropyl alcohol. The most efficient biasing for the assembly of tubes across the electrode gap of 12 μm was a square wave signal of 5 Vrms and 10 Hz. By varying the applied frequency in between 1 and 10 Hz, an enhancement in tube alignment was obtained.http://www.ceramics-silikaty.cz/2012/pdf/2012_03_177.pdfPZTMicrotubesVacuum infiltrationDielectrophoresis |
| spellingShingle | VLADIMÍR KOVAĽ TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES Ceramics-Silikáty PZT Microtubes Vacuum infiltration Dielectrophoresis |
| title | TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES |
| title_full | TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES |
| title_fullStr | TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES |
| title_full_unstemmed | TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES |
| title_short | TEMPLATE-ASSISTED FABRICATION AND DIELECTROPHORETIC MANIPULATION OF PZT MICROTUBES |
| title_sort | template assisted fabrication and dielectrophoretic manipulation of pzt microtubes |
| topic | PZT Microtubes Vacuum infiltration Dielectrophoresis |
| url | http://www.ceramics-silikaty.cz/2012/pdf/2012_03_177.pdf |
| work_keys_str_mv | AT vladimirkoval templateassistedfabricationanddielectrophoreticmanipulationofpztmicrotubes |