Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization
A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated ther...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-03-01
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| Series: | C |
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| Online Access: | http://www.mdpi.com/2311-5629/5/1/11 |
| _version_ | 1817996776471265280 |
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| author | Tatsuhiko Aizawa Kenji Wasa Yoshiro Nogami |
| author_facet | Tatsuhiko Aizawa Kenji Wasa Yoshiro Nogami |
| author_sort | Tatsuhiko Aizawa |
| collection | DOAJ |
| description | A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment. |
| first_indexed | 2024-04-14T02:28:23Z |
| format | Article |
| id | doaj.art-06b03879358b474fa1f3835ef874a094 |
| institution | Directory Open Access Journal |
| issn | 2311-5629 |
| language | English |
| last_indexed | 2024-04-14T02:28:23Z |
| publishDate | 2019-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | C |
| spelling | doaj.art-06b03879358b474fa1f3835ef874a0942022-12-22T02:17:47ZengMDPI AGC2311-56292019-03-01511110.3390/c5010011c5010011Plasma Oxidation Printing into DLC and Graphite for Surface FunctionalizationTatsuhiko Aizawa0Kenji Wasa1Yoshiro Nogami2Surface Design Engineering Laboratory, SIT, 3-15-10 Minami-Rokugo, Ota-City, Tokyo 144-0045, JapanMicroTeX Labs, llc., Ota, Tokyo 144-0045, JapanThermo-graphitics, Co. Ltd., Osaka 551-0031, JapanA diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment.http://www.mdpi.com/2311-5629/5/1/11DLC-nozzleDLC-punch arrayvertically aligned graphitesurface-activated graphitecopper wet-plating |
| spellingShingle | Tatsuhiko Aizawa Kenji Wasa Yoshiro Nogami Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization C DLC-nozzle DLC-punch array vertically aligned graphite surface-activated graphite copper wet-plating |
| title | Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization |
| title_full | Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization |
| title_fullStr | Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization |
| title_full_unstemmed | Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization |
| title_short | Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization |
| title_sort | plasma oxidation printing into dlc and graphite for surface functionalization |
| topic | DLC-nozzle DLC-punch array vertically aligned graphite surface-activated graphite copper wet-plating |
| url | http://www.mdpi.com/2311-5629/5/1/11 |
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