Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To...

Full description

Bibliographic Details
Main Authors: Ya Mou, Zhanqing Yu, Kaitian Huang, Qing Ma, Rong Zeng, Zheyao Wang
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Sensors
Subjects:
ion flow
electric field sensor
MEMS
potential independent
differential structure
Online Access:http://www.mdpi.com/1424-8220/18/6/1740

Similar Items

Similar Items