Features of Metalorganic Chemical Vapor Deposition Selective Area Epitaxy of Al<sub>z</sub>Ga<sub>1−z</sub>As (0 ≤ <i>z</i> ≤ 0.3) Layers in Arrays of Ultrawide Windows
Al<sub>z</sub>Ga<sub>1−z</sub>As layers of various compositions were grown using metalorganic chemical vapor deposition on a GaAs substrate with a pattern of alternating SiO<sub>2</sub> mask/window stripes, each 100 µm wide. Microphotoluminescence maps and thickne...
Main Authors: | Viktor Shamakhov, Sergey Slipchenko, Dmitriy Nikolaev, Ilya Soshnikov, Alexander Smirnov, Ilya Eliseyev, Artyom Grishin, Matvei Kondratov, Artem Rizaev, Nikita Pikhtin, Peter Kop’ev |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-07-01
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Series: | Technologies |
Subjects: | |
Online Access: | https://www.mdpi.com/2227-7080/11/4/89 |
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