Heterogeneously integrated light emitting diodes and photodetectors in the metal-insulator-metal waveguide platform
We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a met...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2023-05-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2022-0784 |
| Summary: | We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either a light emitting diode or a photodetector directly connected to the MIM waveguides. We experimentally verify the independent and combined operations of electrically-driven on-chip light sources and photodetectors. |
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| ISSN: | 2192-8614 |