A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors
Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition betw...
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| Format: | Article |
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MDPI AG
2019-02-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/3/658 |
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| author | Víctor Ruiz-Díez Javier Toledo Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas |
| author_facet | Víctor Ruiz-Díez Javier Toledo Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas |
| author_sort | Víctor Ruiz-Díez |
| collection | DOAJ |
| description | Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm<sup>3</sup> cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10<sup>−6</sup> g/mL and 10<sup>−4</sup> mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz. |
| first_indexed | 2024-04-11T14:04:22Z |
| format | Article |
| id | doaj.art-0745c40f87774392abbd192b6859f4e0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T14:04:22Z |
| publishDate | 2019-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-0745c40f87774392abbd192b6859f4e02022-12-22T04:19:55ZengMDPI AGSensors1424-82202019-02-0119365810.3390/s19030658s19030658A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density SensorsVíctor Ruiz-Díez0Javier Toledo1Jorge Hernando-García2Abdallah Ababneh3Helmut Seidel4José Luis Sánchez-Rojas5Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, SpainMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, SpainMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, SpainElectronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, JordanChair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123 Saarbrücken, GermanyMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, SpainCantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm<sup>3</sup> cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10<sup>−6</sup> g/mL and 10<sup>−4</sup> mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.https://www.mdpi.com/1424-8220/19/3/658high Q-factorliquid mediaout-of-planepiezoelectricAlNcantilever |
| spellingShingle | Víctor Ruiz-Díez Javier Toledo Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors Sensors high Q-factor liquid media out-of-plane piezoelectric AlN cantilever |
| title | A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors |
| title_full | A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors |
| title_fullStr | A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors |
| title_full_unstemmed | A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors |
| title_short | A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors |
| title_sort | geometrical study on the roof tile shaped modes in aln based piezoelectric microcantilevers as viscosity density sensors |
| topic | high Q-factor liquid media out-of-plane piezoelectric AlN cantilever |
| url | https://www.mdpi.com/1424-8220/19/3/658 |
| work_keys_str_mv | AT victorruizdiez ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT javiertoledo ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT jorgehernandogarcia ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT abdallahababneh ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT helmutseidel ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT joseluissanchezrojas ageometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT victorruizdiez geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT javiertoledo geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT jorgehernandogarcia geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT abdallahababneh geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT helmutseidel geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors AT joseluissanchezrojas geometricalstudyontherooftileshapedmodesinalnbasedpiezoelectricmicrocantileversasviscositydensitysensors |