Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires
Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO<inline-formula> <math display="inline"> <semanti...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-07-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/14/3049 |
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| author | Florentyna Sosada-Ludwikowska Robert Wimmer-Teubenbacher Martin Sagmeister Anton Köck |
| author_facet | Florentyna Sosada-Ludwikowska Robert Wimmer-Teubenbacher Martin Sagmeister Anton Köck |
| author_sort | Florentyna Sosada-Ludwikowska |
| collection | DOAJ |
| description | Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula>S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity. |
| first_indexed | 2024-04-11T18:18:21Z |
| format | Article |
| id | doaj.art-0797758975b141638f0a4114cb7b4d33 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:18:21Z |
| publishDate | 2019-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-0797758975b141638f0a4114cb7b4d332022-12-22T04:09:50ZengMDPI AGSensors1424-82202019-07-011914304910.3390/s19143049s19143049Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide NanowiresFlorentyna Sosada-Ludwikowska0Robert Wimmer-Teubenbacher1Martin Sagmeister2Anton Köck3Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, AustriaMicroelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austriaams AG, 8141 Premstätten, AustriaMicroelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, AustriaMetal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula> nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2</mn> </msub> </semantics> </math> </inline-formula>S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.https://www.mdpi.com/1424-8220/19/14/3049SnO<sub>2</sub>nanowirestransfer printingPDMSgas sensorsmetal oxides |
| spellingShingle | Florentyna Sosada-Ludwikowska Robert Wimmer-Teubenbacher Martin Sagmeister Anton Köck Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires Sensors SnO<sub>2</sub> nanowires transfer printing PDMS gas sensors metal oxides |
| title | Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires |
| title_full | Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires |
| title_fullStr | Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires |
| title_full_unstemmed | Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires |
| title_short | Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires |
| title_sort | transfer printing technology as a straightforward method to fabricate chemical sensors based on tin dioxide nanowires |
| topic | SnO<sub>2</sub> nanowires transfer printing PDMS gas sensors metal oxides |
| url | https://www.mdpi.com/1424-8220/19/14/3049 |
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