| Summary: | This paper discusses the surface modification processing of kovar alloy (Fe-29.72wt%Ni-16.28wt%Co) by Na2SO4 electrolyzed oxidizing water (hereinafter referred to as EO water). First, the etching effect of Na2SO4 EO water on the surface of kovar alloy was clarified by comparative experiments of chemicals and NaCl EO water. The comparative study showed that as for the etching effect on the surface of kovar alloy, Na2SO4 EO water was superior to H2SO4 solution, but inferior to NaCl EO water. Next, by the observation using SEM image, the influence of Na2SO4 EO water on the surface shape of kovar alloy was clarified. The results indicated that when using Na2SO4 EO water, the surface of polished test pieces which had not been heat-treated becomes smooth, but in the test pieces surface which had been heat-treated, a lot of dimples had occurred. When using the supersonic together with one of Na2SO4 EO water or NaCl EO water, the surface shape became smooth. Lastly, as for the test pieces after heat treatment, the surface oxidation layer removal experiment by the immersion was carried out. The results showed that Na2SO4 EO water could remove the surface oxidation layer like H2SO4 solution approximately. However, thin surface oxidation layer might be formed when using Na2SO4 EO water. By this study, we received the suggestion that Na2SO4 EO water could be applied to the surface treatment such as the etching of kovar alloy.
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