Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide

Transition metal dichalcogenides (TMDCs) have attracted intense interest; however, despite the considerable effort of researchers, a universal manufacturing method that can guarantee both high material quality and throughput has not been realized to date. Herein, a universal approach to producing hi...

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Main Authors: Sein Kim, Seung-Il Kim, Soheil Ghods, Jin-Su Kim, Young Cheol Lee, Hyung Jun Kwun, Ji-Yun Moon, Jae-Hyun Lee
Format: Article
Language:English
Published: Wiley-VCH 2023-09-01
Series:Small Science
Subjects:
Online Access:https://doi.org/10.1002/smsc.202300033
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author Sein Kim
Seung-Il Kim
Soheil Ghods
Jin-Su Kim
Young Cheol Lee
Hyung Jun Kwun
Ji-Yun Moon
Jae-Hyun Lee
author_facet Sein Kim
Seung-Il Kim
Soheil Ghods
Jin-Su Kim
Young Cheol Lee
Hyung Jun Kwun
Ji-Yun Moon
Jae-Hyun Lee
author_sort Sein Kim
collection DOAJ
description Transition metal dichalcogenides (TMDCs) have attracted intense interest; however, despite the considerable effort of researchers, a universal manufacturing method that can guarantee both high material quality and throughput has not been realized to date. Herein, a universal approach to producing high‐quality monolayer TMDCs on a large scale via germanium (Ge)‐mediated atomic spalling is presented. Through the modified analytic model, the study verifies that the thin Ge film could be a suitable stressor that effectively reduces the crack propagation depth at the sub‐nanometer range. In particular, an acid‐etching process is not required in the overall atomic spalling process due to the water‐soluble nature of the Ge, enabling it widely applicable to various TMDCs. Under the optimized spalling conditions, a millimeter‐sized monolayer of stable MoS2, as well as unstable MoTe2, is successfully achieved. Through detailed spectroscopic and electrical characterizations, it is confirmed that the proposed methodology for obtaining large‐area atomic layers does not introduce any significant structural defects or chemical contaminations.
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spelling doaj.art-080cd8ee22e142ca9645df6bb657a45f2023-09-26T05:35:39ZengWiley-VCHSmall Science2688-40462023-09-0139n/an/a10.1002/smsc.202300033Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal DichalcogenideSein Kim0Seung-Il Kim1Soheil Ghods2Jin-Su Kim3Young Cheol Lee4Hyung Jun Kwun5Ji-Yun Moon6Jae-Hyun Lee7Department of Energy Systems Research Ajou University Suwon 16499 Republic of KoreaDepartment of Energy Systems Research Ajou University Suwon 16499 Republic of KoreaDepartment of Energy Systems Research Ajou University Suwon 16499 Republic of KoreaDepartment of Materials Science and Engineering Ajou University Suwon 16499 Republic of KoreaDepartment of Materials Science and Engineering Ajou University Suwon 16499 Republic of KoreaDepartment of Materials Science and Engineering Ajou University Suwon 16499 Republic of KoreaDepartment of Energy Systems Research Ajou University Suwon 16499 Republic of KoreaDepartment of Energy Systems Research Ajou University Suwon 16499 Republic of KoreaTransition metal dichalcogenides (TMDCs) have attracted intense interest; however, despite the considerable effort of researchers, a universal manufacturing method that can guarantee both high material quality and throughput has not been realized to date. Herein, a universal approach to producing high‐quality monolayer TMDCs on a large scale via germanium (Ge)‐mediated atomic spalling is presented. Through the modified analytic model, the study verifies that the thin Ge film could be a suitable stressor that effectively reduces the crack propagation depth at the sub‐nanometer range. In particular, an acid‐etching process is not required in the overall atomic spalling process due to the water‐soluble nature of the Ge, enabling it widely applicable to various TMDCs. Under the optimized spalling conditions, a millimeter‐sized monolayer of stable MoS2, as well as unstable MoTe2, is successfully achieved. Through detailed spectroscopic and electrical characterizations, it is confirmed that the proposed methodology for obtaining large‐area atomic layers does not introduce any significant structural defects or chemical contaminations.https://doi.org/10.1002/smsc.202300033atomic spallinggermaniummonolayerstransition metal dichalcogenideswet etching
spellingShingle Sein Kim
Seung-Il Kim
Soheil Ghods
Jin-Su Kim
Young Cheol Lee
Hyung Jun Kwun
Ji-Yun Moon
Jae-Hyun Lee
Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
Small Science
atomic spalling
germanium
monolayers
transition metal dichalcogenides
wet etching
title Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
title_full Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
title_fullStr Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
title_full_unstemmed Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
title_short Nonmetal‐Mediated Atomic Spalling of Large‐Area Monolayer Transition Metal Dichalcogenide
title_sort nonmetal mediated atomic spalling of large area monolayer transition metal dichalcogenide
topic atomic spalling
germanium
monolayers
transition metal dichalcogenides
wet etching
url https://doi.org/10.1002/smsc.202300033
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