Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge

The integration of epitaxial complex oxides on semiconductor and flexible substrates is required but challenging. Here, the authors report the highly heterogeneous epitaxy of transferrable BaTiO3-δ membrane with enhanced flexoelectricity on Ge (011).

Bibliographic Details
Main Authors: Liyan Dai, Jinyan Zhao, Jingrui Li, Bohan Chen, Shijie Zhai, Zhongying Xue, Zengfeng Di, Boyuan Feng, Yanxiao Sun, Yunyun Luo, Ming Ma, Jie Zhang, Sunan Ding, Libo Zhao, Zhuangde Jiang, Wenbo Luo, Yi Quan, Jutta Schwarzkopf, Thomas Schroeder, Zuo-Guang Ye, Ya-Hong Xie, Wei Ren, Gang Niu
Format: Article
Language:English
Published: Nature Portfolio 2022-05-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-022-30724-7
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author Liyan Dai
Jinyan Zhao
Jingrui Li
Bohan Chen
Shijie Zhai
Zhongying Xue
Zengfeng Di
Boyuan Feng
Yanxiao Sun
Yunyun Luo
Ming Ma
Jie Zhang
Sunan Ding
Libo Zhao
Zhuangde Jiang
Wenbo Luo
Yi Quan
Jutta Schwarzkopf
Thomas Schroeder
Zuo-Guang Ye
Ya-Hong Xie
Wei Ren
Gang Niu
author_facet Liyan Dai
Jinyan Zhao
Jingrui Li
Bohan Chen
Shijie Zhai
Zhongying Xue
Zengfeng Di
Boyuan Feng
Yanxiao Sun
Yunyun Luo
Ming Ma
Jie Zhang
Sunan Ding
Libo Zhao
Zhuangde Jiang
Wenbo Luo
Yi Quan
Jutta Schwarzkopf
Thomas Schroeder
Zuo-Guang Ye
Ya-Hong Xie
Wei Ren
Gang Niu
author_sort Liyan Dai
collection DOAJ
description The integration of epitaxial complex oxides on semiconductor and flexible substrates is required but challenging. Here, the authors report the highly heterogeneous epitaxy of transferrable BaTiO3-δ membrane with enhanced flexoelectricity on Ge (011).
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spelling doaj.art-086e2df161d74cb189e091ed8908a8372022-12-22T02:31:44ZengNature PortfolioNature Communications2041-17232022-05-0113111010.1038/s41467-022-30724-7Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on GeLiyan Dai0Jinyan Zhao1Jingrui Li2Bohan Chen3Shijie Zhai4Zhongying Xue5Zengfeng Di6Boyuan Feng7Yanxiao Sun8Yunyun Luo9Ming Ma10Jie Zhang11Sunan Ding12Libo Zhao13Zhuangde Jiang14Wenbo Luo15Yi Quan16Jutta Schwarzkopf17Thomas Schroeder18Zuo-Guang Ye19Ya-Hong Xie20Wei Ren21Gang Niu22Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of ScienceState Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of ScienceSuzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of SciencesElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityThe State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversitySuzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of SciencesThe State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityThe State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of ChinaElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityLeibniz-Institut für KristallzüchtungLeibniz-Institut für KristallzüchtungDepartment of Chemistry and 4D LABS, Simon Fraser UniversityDepartment of Materials Science and Engineering, University of CaliforniaElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityElectronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong UniversityThe integration of epitaxial complex oxides on semiconductor and flexible substrates is required but challenging. Here, the authors report the highly heterogeneous epitaxy of transferrable BaTiO3-δ membrane with enhanced flexoelectricity on Ge (011).https://doi.org/10.1038/s41467-022-30724-7
spellingShingle Liyan Dai
Jinyan Zhao
Jingrui Li
Bohan Chen
Shijie Zhai
Zhongying Xue
Zengfeng Di
Boyuan Feng
Yanxiao Sun
Yunyun Luo
Ming Ma
Jie Zhang
Sunan Ding
Libo Zhao
Zhuangde Jiang
Wenbo Luo
Yi Quan
Jutta Schwarzkopf
Thomas Schroeder
Zuo-Guang Ye
Ya-Hong Xie
Wei Ren
Gang Niu
Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
Nature Communications
title Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
title_full Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
title_fullStr Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
title_full_unstemmed Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
title_short Highly heterogeneous epitaxy of flexoelectric BaTiO3-δ membrane on Ge
title_sort highly heterogeneous epitaxy of flexoelectric batio3 δ membrane on ge
url https://doi.org/10.1038/s41467-022-30724-7
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