Droplet-Assisted Laser Direct Nanoscale Writing on Silicon
Nano-structuring using laser direct writing technology has shown great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water dro...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-03-01
|
| Series: | Technologies |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2227-7080/4/1/8 |
| _version_ | 1818562433787101184 |
|---|---|
| author | Yuan-Jen Chang Chao-Hsuan Chang Chao-Ching Ho Jin-Chen Hsu Chia-Lung Kuo |
| author_facet | Yuan-Jen Chang Chao-Hsuan Chang Chao-Ching Ho Jin-Chen Hsu Chia-Lung Kuo |
| author_sort | Yuan-Jen Chang |
| collection | DOAJ |
| description | Nano-structuring using laser direct writing technology has shown great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricated holes with a diameter of 600 nm at a substrate temperature of 12 ∘C and a power density of 1.2 × 108 W/cm2 in our experiments. We also found that the hole diameter was around a ninth of the water droplet diameter. Meanwhile, the machined holes are not affected much by the focal length of the lens, but a hole with less than 100 nm in diameter at the center was observed. |
| first_indexed | 2024-12-14T01:03:41Z |
| format | Article |
| id | doaj.art-088f0bfc64f8468ea201e1afb33be3fe |
| institution | Directory Open Access Journal |
| issn | 2227-7080 |
| language | English |
| last_indexed | 2024-12-14T01:03:41Z |
| publishDate | 2016-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Technologies |
| spelling | doaj.art-088f0bfc64f8468ea201e1afb33be3fe2022-12-21T23:23:04ZengMDPI AGTechnologies2227-70802016-03-0141810.3390/technologies4010008technologies4010008Droplet-Assisted Laser Direct Nanoscale Writing on SiliconYuan-Jen Chang0Chao-Hsuan Chang1Chao-Ching Ho2Jin-Chen Hsu3Chia-Lung Kuo4Department of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, TaiwanDepartment of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, TaiwanDepartment of Mechanical Engineering, National Taipei University of Technology, Taipei 106, TaiwanDepartment of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, TaiwanDepartment of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, TaiwanNano-structuring using laser direct writing technology has shown great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricated holes with a diameter of 600 nm at a substrate temperature of 12 ∘C and a power density of 1.2 × 108 W/cm2 in our experiments. We also found that the hole diameter was around a ninth of the water droplet diameter. Meanwhile, the machined holes are not affected much by the focal length of the lens, but a hole with less than 100 nm in diameter at the center was observed.http://www.mdpi.com/2227-7080/4/1/8direct writinglaserdropletnanoscale |
| spellingShingle | Yuan-Jen Chang Chao-Hsuan Chang Chao-Ching Ho Jin-Chen Hsu Chia-Lung Kuo Droplet-Assisted Laser Direct Nanoscale Writing on Silicon Technologies direct writing laser droplet nanoscale |
| title | Droplet-Assisted Laser Direct Nanoscale Writing on Silicon |
| title_full | Droplet-Assisted Laser Direct Nanoscale Writing on Silicon |
| title_fullStr | Droplet-Assisted Laser Direct Nanoscale Writing on Silicon |
| title_full_unstemmed | Droplet-Assisted Laser Direct Nanoscale Writing on Silicon |
| title_short | Droplet-Assisted Laser Direct Nanoscale Writing on Silicon |
| title_sort | droplet assisted laser direct nanoscale writing on silicon |
| topic | direct writing laser droplet nanoscale |
| url | http://www.mdpi.com/2227-7080/4/1/8 |
| work_keys_str_mv | AT yuanjenchang dropletassistedlaserdirectnanoscalewritingonsilicon AT chaohsuanchang dropletassistedlaserdirectnanoscalewritingonsilicon AT chaochingho dropletassistedlaserdirectnanoscalewritingonsilicon AT jinchenhsu dropletassistedlaserdirectnanoscalewritingonsilicon AT chialungkuo dropletassistedlaserdirectnanoscalewritingonsilicon |