Droplet-Assisted Laser Direct Nanoscale Writing on Silicon

Droplet-Assisted Laser Direct Nanoscale Writing on Silicon

Nano-structuring using laser direct writing technology has shown great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water dro...

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Bibliographic Details
Main Authors: Yuan-Jen Chang, Chao-Hsuan Chang, Chao-Ching Ho, Jin-Chen Hsu, Chia-Lung Kuo
Format: Article
Language:English
Published: MDPI AG 2016-03-01
Series:Technologies
Subjects:
direct writing
laser
droplet
nanoscale
Online Access:http://www.mdpi.com/2227-7080/4/1/8

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