Operation modes of the FALCON ion source as a part of the AMS cluster tool
The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of operational frequencies. The paper focuses on the preparation of large wafers with SiO2 and AlN/Si3N4 depositions. Stability of the intermediate...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Sciendo
2015-06-01
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Series: | Nukleonika |
Subjects: | |
Online Access: | https://doi.org/10.1515/nuka-2015-0059 |