Operation modes of the FALCON ion source as a part of the AMS cluster tool

Operation modes of the FALCON ion source as a part of the AMS cluster tool

The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of operational frequencies. The paper focuses on the preparation of large wafers with SiO2 and AlN/Si3N4 depositions. Stability of the intermediate...

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Bibliographic Details
Main Authors: Girka Oleksii, Bizyukov Alexander, Bizyukov Ivan, Gutkin Michael, Mishin Sergei
Format: Article
Language:English
Published: Sciendo 2015-06-01
Series:Nukleonika
Subjects:
falcon
ion sourcem
surface wave
cluster tool
Online Access:https://doi.org/10.1515/nuka-2015-0059

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