Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

Bibliographic Details
Main Authors: John T. Fourkas, Jinwei Gao, Zheng Han, Haitao Liu, Benedetta Marmiroli, Michael J. Naughton, John S. Petersen, Yong Sun, Alex Vagilio Pret, Yuebing Zheng
Format: Article
Language:English
Published: Frontiers Media S.A. 2021-10-01
Series:Frontiers in Nanotechnology
Subjects:
nanofabrication
lithography
self-assembly
EUV lithography
parallel patterning
3D nanofabrication
Online Access:https://www.frontiersin.org/articles/10.3389/fnano.2021.700849/full
Description
ISSN:2673-3013

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