Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition

Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition

TiO<sub>2</sub> thin films deposited by atomic layer deposition (ALD) at low temperatures (<100 °C) are, in general, amorphous and exhibit a smaller refractive index in comparison to their crystalline counterparts. Nonetheless, low-temperature ALD is needed when the substrates or temp...

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Bibliographic Details
Main Authors: Martin Waleczek, Jolien Dendooven, Pavel Dyachenko, Alexander Y. Petrov, Manfred Eich, Robert H. Blick, Christophe Detavernier, Kornelius Nielsch, Kaline P. Furlan, Robert Zierold
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Nanomaterials
Subjects:
atomic layer deposition
optical properties
inverse opal photonic crystals
bio-inspired materials
ceramics
high-temperature stability
Online Access:https://www.mdpi.com/2079-4991/11/4/1053

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