Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the...

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Bibliographic Details
Main Authors: Bing-Yu Wang, Fan-Chun Hsieh, Che-Yu Lin, Shao-En Chen, Fong-Zhi Chen, Chia-Che Wu
Format: Article
Language:English
Published: MDPI AG 2014-11-01
Series:Sensors
Subjects:
vacuum pressure sensor
viscous forces
piezoelectric beam
Online Access:http://www.mdpi.com/1424-8220/14/11/22099

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