Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-02-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/5/1806 |
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| author | Mario Alberto García-Ramírez Orfil González-Reynoso Miguel Angel Bello-Jiménez Everado Vargas-Rodríguez |
| author_facet | Mario Alberto García-Ramírez Orfil González-Reynoso Miguel Angel Bello-Jiménez Everado Vargas-Rodríguez |
| author_sort | Mario Alberto García-Ramírez |
| collection | DOAJ |
| description | In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics. |
| first_indexed | 2024-03-09T20:20:59Z |
| format | Article |
| id | doaj.art-099808f0e31c45d7a4591f5359046103 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T20:20:59Z |
| publishDate | 2022-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-099808f0e31c45d7a4591f53590461032023-11-23T23:46:30ZengMDPI AGSensors1424-82202022-02-01225180610.3390/s22051806Design, Fabrication, and Characterisation of a Label-Free Nanosensor for BioapplicationsMario Alberto García-Ramírez0Orfil González-Reynoso1Miguel Angel Bello-Jiménez2Everado Vargas-Rodríguez3Electronics Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, MexicoChemistry Engineering Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, MexicoDepartamento de Estudios Multidisciplinarios, División Campus Irapuato-Salamanca, Universidad de Guanajuato, Av. Universidad s/n, Col. Yacatitas, Yuriria, Guanajuato 38940, MexicoInstituto de Investigación en Comunicación Óptica (IICO), Universidad Autónoma de San Luis Potosí, Av. Karakorum No. 1470 Lomas 4<sup>a</sup> Secc., San Luis Potosí 78210, MexicoIn this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.https://www.mdpi.com/1424-8220/22/5/1806biosensorshybrid semiconductor structureNEMS/MEMSfabrication processnumerical analysis |
| spellingShingle | Mario Alberto García-Ramírez Orfil González-Reynoso Miguel Angel Bello-Jiménez Everado Vargas-Rodríguez Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications Sensors biosensors hybrid semiconductor structure NEMS/MEMS fabrication process numerical analysis |
| title | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
| title_full | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
| title_fullStr | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
| title_full_unstemmed | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
| title_short | Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications |
| title_sort | design fabrication and characterisation of a label free nanosensor for bioapplications |
| topic | biosensors hybrid semiconductor structure NEMS/MEMS fabrication process numerical analysis |
| url | https://www.mdpi.com/1424-8220/22/5/1806 |
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