Post-growth enhancement of CVD-grown hexagonal boron nitride films on sapphire

Post-growth enhancement of CVD-grown hexagonal boron nitride films on sapphire

This study explores the effect of post-growth annealing on hexagonal boron nitride (hBN) films grown on c-sapphire substrates by chemical vapor deposition as post-growth annealing proves to overcome the equipment limitations of commercial thermal CVD systems and offers a simplistic way to enhance th...

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Bibliographic Details
Main Authors: Ranjan Singhal, Elena Echeverria, David N. McIlroy, Raj N. Singh
Format: Article
Language:English
Published: Elsevier 2022-12-01
Series:Results in Materials
Subjects:
Hexagonal boron nitride
Post-growth annealing
CVD
Online Access:http://www.sciencedirect.com/science/article/pii/S2590048X22000875

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