Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology
Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Her...
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| Format: | Article |
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MDPI AG
2022-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/2/218 |
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| author | Bao-Xu Wang Jia-Xin Zheng Jin-Yong Qi Ming-Rui Guo Bing-Rong Gao Xue-Qing Liu |
| author_facet | Bao-Xu Wang Jia-Xin Zheng Jin-Yong Qi Ming-Rui Guo Bing-Rong Gao Xue-Qing Liu |
| author_sort | Bao-Xu Wang |
| collection | DOAJ |
| description | Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems. |
| first_indexed | 2024-03-09T21:25:16Z |
| format | Article |
| id | doaj.art-0a1e1bef1c6249f0ac1d279cca65194c |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T21:25:16Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0a1e1bef1c6249f0ac1d279cca65194c2023-11-23T21:10:27ZengMDPI AGMicromachines2072-666X2022-01-0113221810.3390/mi13020218Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching TechnologyBao-Xu Wang0Jia-Xin Zheng1Jin-Yong Qi2Ming-Rui Guo3Bing-Rong Gao4Xue-Qing Liu5State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaMicro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.https://www.mdpi.com/2072-666X/13/2/218MOEMSsilicon microcantilevermultifocal microlens arrayfemtosecond laserdry etching |
| spellingShingle | Bao-Xu Wang Jia-Xin Zheng Jin-Yong Qi Ming-Rui Guo Bing-Rong Gao Xue-Qing Liu Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology Micromachines MOEMS silicon microcantilever multifocal microlens array femtosecond laser dry etching |
| title | Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology |
| title_full | Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology |
| title_fullStr | Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology |
| title_full_unstemmed | Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology |
| title_short | Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology |
| title_sort | integration of multifocal microlens array on silicon microcantilever via femtosecond laser assisted etching technology |
| topic | MOEMS silicon microcantilever multifocal microlens array femtosecond laser dry etching |
| url | https://www.mdpi.com/2072-666X/13/2/218 |
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