Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Her...

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Bibliographic Details
Main Authors: Bao-Xu Wang, Jia-Xin Zheng, Jin-Yong Qi, Ming-Rui Guo, Bing-Rong Gao, Xue-Qing Liu
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
MOEMS
silicon microcantilever
multifocal microlens array
femtosecond laser
dry etching
Online Access:https://www.mdpi.com/2072-666X/13/2/218

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