The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures

The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures

We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital...

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Bibliographic Details
Main Authors:	Lin Shu, Bin Peng, Chuan Li, Dongdong Gong, Zhengbing Yang, Xingzhao Liu, Wanli Zhang
Format:	Article
Language:	English
Published:	MDPI AG 2016-04-01
Series:	Sensors
Subjects:	AlN film TC4 surface acoustic wave layered structure simulation
Online Access:	http://www.mdpi.com/1424-8220/16/4/526

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