Thermodynamic Analysis of Group-III-Nitride Alloying with Yttrium by Hybrid Chemical Vapor Deposition

Thermodynamic Analysis of Group-III-Nitride Alloying with Yttrium by Hybrid Chemical Vapor Deposition

Group-IIIb-transition-metal-alloyed wurtzite Group-IIIa-nitride (IIIb-IIIa-N) thin films have higher piezoelectric characteristics than binary IIIa-N for a broad range of applications in photonic, electronic, sensing, and energy harvesting systems. We perform theoretical thermodynamic analysis for t...

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Bibliographic Details
Main Authors: Mina Moradnia, Sara Pouladi, Muhammad Aqib, Jae-Hyun Ryou
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Nanomaterials
Subjects:
alloying
piezoelectric
HybCVD
thermodynamic calculations
thin film
Online Access:https://www.mdpi.com/2079-4991/12/22/4053

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