| Summary: | Integrated inductor is one of the fundamental components and has been widely used in radio frequency integrated circuits (RFICs). It has been challenging to achieve simultaneously high inductance and quality factor, particularly at GHz frequencies. In this work, we reported a novel integrated solenoid inductor with a magnetic NiZn ferrite as the core material, which was deposited by a low-cost spin spray technique. These integrated inductors showed a significant improvement in both inductance and quality factor at GHz frequencies over their air core counterparts. A stable inductance was observed within a wide frequency ranged from 700 MHz to 6 GHz. The peak value of quality factor reached 23, a relatively higher value not reported for solenoid inductors up to date. Our results indicate that the integrated inductor are promising for applications in RFICs.
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