Visualizing nanometric structures with sub-millimeter waves
The authors demonstrate a far-field approach for height profile measurements with sub-millimetre waves. By evaluating Fabry-Pérot oscillations within surface-structured samples, combined with a Hilbert-transform approach, they visualize structures with a height of 49 nm, with 31 nm precision.
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2021-12-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-021-27264-x |