High Performance Amorphous In0.5Ga0.5O Thin‐Film Transistor Embedded with Nanocrystalline In2O3 Dots for Flexible Display Application
Abstract High‐performance, coplanar amorphous In0.5Ga0.5O (a‐IGO) thin film transistor (TFT) on a polyimide (PI) substrate deposited by spray pyrolysis (SP) is reported. The SP a‐IGO film deposited at 370 °C has less than 8% nanocrystalline‐In2O3 dots and a mass density of 6.6 g cm−3. The a‐IGO TFT...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2023-10-01
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Series: | Advanced Electronic Materials |
Subjects: | |
Online Access: | https://doi.org/10.1002/aelm.202300169 |