Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-freque...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/19/2/380 |
| Summary: | Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low. |
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| ISSN: | 1424-8220 |