Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure

Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-freque...

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Main Authors: Mohammad H. Hasan, Fadi Alsaleem, Abdallah Ramini
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/19/2/380
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author Mohammad H. Hasan
Fadi Alsaleem
Abdallah Ramini
author_facet Mohammad H. Hasan
Fadi Alsaleem
Abdallah Ramini
author_sort Mohammad H. Hasan
collection DOAJ
description Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low.
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spelling doaj.art-0b5741733e414e1092711b72b9e75a442022-12-22T03:58:48ZengMDPI AGSensors1424-82202019-01-0119238010.3390/s19020380s19020380Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever MicrostructureMohammad H. Hasan0Fadi Alsaleem1Abdallah Ramini2The Mechanical Engineering Department, University of Nebraska at Lincoln, Lincoln, NE 68588, USAThe School of Architectural Engineering University of Nebraska at Lincoln, Omaha, NE 68182, USAThe Mechanical Engineering & Mechanical Engineering Technology, Penn State Harrisburg, Harrisburg, PA 17057, USACantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low.http://www.mdpi.com/1424-8220/19/2/380double-resonancecantilever microstructureRLC circuit
spellingShingle Mohammad H. Hasan
Fadi Alsaleem
Abdallah Ramini
Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
Sensors
double-resonance
cantilever microstructure
RLC circuit
title Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
title_full Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
title_fullStr Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
title_full_unstemmed Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
title_short Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure
title_sort voltage and deflection amplification via double resonance excitation in a cantilever microstructure
topic double-resonance
cantilever microstructure
RLC circuit
url http://www.mdpi.com/1424-8220/19/2/380
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AT fadialsaleem voltageanddeflectionamplificationviadoubleresonanceexcitationinacantilevermicrostructure
AT abdallahramini voltageanddeflectionamplificationviadoubleresonanceexcitationinacantilevermicrostructure