Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks

Abstract Thin-film vertical cavity surface emitting lasers (VCSELs) mounted onto heatsinks open up the way toward low-power consumption and high-power operation, enabling them to be widely used for energy saving high-speed optical data communication and three-dimensional sensor applications. There a...

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Main Authors: Sunghyun Moon, Yeojun Yun, Minhyung Lee, Donghwan Kim, Wonjin Choi, Ji-Yong Park, Jaejin Lee
Format: Article
Language:English
Published: Nature Portfolio 2022-01-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-021-04625-6
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author Sunghyun Moon
Yeojun Yun
Minhyung Lee
Donghwan Kim
Wonjin Choi
Ji-Yong Park
Jaejin Lee
author_facet Sunghyun Moon
Yeojun Yun
Minhyung Lee
Donghwan Kim
Wonjin Choi
Ji-Yong Park
Jaejin Lee
author_sort Sunghyun Moon
collection DOAJ
description Abstract Thin-film vertical cavity surface emitting lasers (VCSELs) mounted onto heatsinks open up the way toward low-power consumption and high-power operation, enabling them to be widely used for energy saving high-speed optical data communication and three-dimensional sensor applications. There are two conventional VCSEL polarity structures: p-on-n and n-on-p polarity. The former is more preferably used owing to the reduced series resistance of n-type bottom distributed Bragg reflection (DBR) as well as the lower defect densities of n-type GaAs substrates. In this study, the p-on-n structures of thin-film VCSELs, including an etch stop layer and a highly n-doped GaAs ohmic layer, were epitaxially grown in upright order by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD). The p-on-n structures of thin-film VCSELs were transferred onto an aluminum heatsink via a double-transfer technique, allowing the top-emitting thin-film VCSELs to keep the p-on-n polarity with the removal of the GaAs substrate. The threshold current (I th ) and voltage (V th ) of the fabricated top-emitting thin-film VCSELs were 1 mA and 2.8 V, respectively. The optical power was 7.7 mW at a rollover point of 16.1 mA.
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spelling doaj.art-0b74d6439e2148de8172875d4855bca42022-12-22T04:09:13ZengNature PortfolioScientific Reports2045-23222022-01-011211710.1038/s41598-021-04625-6Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinksSunghyun Moon0Yeojun Yun1Minhyung Lee2Donghwan Kim3Wonjin Choi4Ji-Yong Park5Jaejin Lee6Department of Electrical and Computer Engineering, Ajou UniversityDepartment of Electrical and Computer Engineering, Ajou UniversityDepartment of Electrical and Computer Engineering, Ajou UniversityRayIR Corporation, LTDRayIR Corporation, LTDDepartment of Physics and Department of Energy Systems Research, Ajou UniversityDepartment of Electrical and Computer Engineering, Ajou UniversityAbstract Thin-film vertical cavity surface emitting lasers (VCSELs) mounted onto heatsinks open up the way toward low-power consumption and high-power operation, enabling them to be widely used for energy saving high-speed optical data communication and three-dimensional sensor applications. There are two conventional VCSEL polarity structures: p-on-n and n-on-p polarity. The former is more preferably used owing to the reduced series resistance of n-type bottom distributed Bragg reflection (DBR) as well as the lower defect densities of n-type GaAs substrates. In this study, the p-on-n structures of thin-film VCSELs, including an etch stop layer and a highly n-doped GaAs ohmic layer, were epitaxially grown in upright order by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD). The p-on-n structures of thin-film VCSELs were transferred onto an aluminum heatsink via a double-transfer technique, allowing the top-emitting thin-film VCSELs to keep the p-on-n polarity with the removal of the GaAs substrate. The threshold current (I th ) and voltage (V th ) of the fabricated top-emitting thin-film VCSELs were 1 mA and 2.8 V, respectively. The optical power was 7.7 mW at a rollover point of 16.1 mA.https://doi.org/10.1038/s41598-021-04625-6
spellingShingle Sunghyun Moon
Yeojun Yun
Minhyung Lee
Donghwan Kim
Wonjin Choi
Ji-Yong Park
Jaejin Lee
Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
Scientific Reports
title Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
title_full Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
title_fullStr Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
title_full_unstemmed Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
title_short Top-emitting 940-nm thin-film VCSELs transferred onto aluminum heatsinks
title_sort top emitting 940 nm thin film vcsels transferred onto aluminum heatsinks
url https://doi.org/10.1038/s41598-021-04625-6
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