A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars

A Comparative Study on the Effects of Passivation Methods on the Carrier Lifetime of RIE and MACE Silicon Micropillars

Silicon micropillars have been suggested as one of the techniques for improving the efficiency of devices. Fabrication of micropillars has been done in several ways—Metal Assisted Chemical Etching (MACE) and Reactive Ion Etching (RIE) being the most popular techniques. These techniques inc...

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Bibliographic Details
Main Author:	Amal Kabalan
Format:	Article
Language:	English
Published:	MDPI AG 2019-04-01
Series:	Applied Sciences
Subjects:	silicon micropillars passivation reactive ion etching and metal assisted ion etching
Online Access:	https://www.mdpi.com/2076-3417/9/9/1804

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