A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application
A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 <inline-formula><math...
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| Format: | Article |
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MDPI AG
2023-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/4/810 |
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| author | Jing Xu Graham S. Wood Enrico Mastropaolo Peter Lomax Michael Newton Rebecca Cheung |
| author_facet | Jing Xu Graham S. Wood Enrico Mastropaolo Peter Lomax Michael Newton Rebecca Cheung |
| author_sort | Jing Xu |
| collection | DOAJ |
| description | A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing. |
| first_indexed | 2024-03-11T04:43:12Z |
| format | Article |
| id | doaj.art-0c502c65587e4ff39fd6b8d7277e51c2 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T04:43:12Z |
| publishDate | 2023-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0c502c65587e4ff39fd6b8d7277e51c22023-11-17T20:29:41ZengMDPI AGMicromachines2072-666X2023-04-0114481010.3390/mi14040810A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic ApplicationJing Xu0Graham S. Wood1Enrico Mastropaolo2Peter Lomax3Michael Newton4Rebecca Cheung5The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UKThe School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UKThe School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UKThe School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UKThe Acoustics and Audio Group, University of Edinburgh, Edinburgh EH8 9DF, UKThe School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UKA graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane’s displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.https://www.mdpi.com/2072-666X/14/4/810grapheneultrasoundMEMSresonator |
| spellingShingle | Jing Xu Graham S. Wood Enrico Mastropaolo Peter Lomax Michael Newton Rebecca Cheung A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application Micromachines graphene ultrasound MEMS resonator |
| title | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
| title_full | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
| title_fullStr | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
| title_full_unstemmed | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
| title_short | A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application |
| title_sort | closed cavity ultrasonic resonator formed by graphene pmma membrane for acoustic application |
| topic | graphene ultrasound MEMS resonator |
| url | https://www.mdpi.com/2072-666X/14/4/810 |
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