A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 <inline-formula><math...

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Bibliographic Details
Main Authors: Jing Xu, Graham S. Wood, Enrico Mastropaolo, Peter Lomax, Michael Newton, Rebecca Cheung
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
graphene
ultrasound
MEMS
resonator
Online Access:https://www.mdpi.com/2072-666X/14/4/810

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