Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures
Hot film sensors detect the flow shear stress based on the forced convection heat transfer to the fluid. Current hot film sensors have been significantly hindered by the relatively low sensitivity due to the massive heat conduction to the substrate. This paper describes the design, fabrication, simu...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/22/6657 |
| _version_ | 1797547248743088128 |
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| author | Yu-Chao Yan Cheng-Yu Jiang Run-Bo Chen Bing-He Ma Jin-Jun Deng Shao-Jun Zheng Jian Luo |
| author_facet | Yu-Chao Yan Cheng-Yu Jiang Run-Bo Chen Bing-He Ma Jin-Jun Deng Shao-Jun Zheng Jian Luo |
| author_sort | Yu-Chao Yan |
| collection | DOAJ |
| description | Hot film sensors detect the flow shear stress based on the forced convection heat transfer to the fluid. Current hot film sensors have been significantly hindered by the relatively low sensitivity due to the massive heat conduction to the substrate. This paper describes the design, fabrication, simulation, and testing of a novel flow sensor with dual-layer hot film structures. More specifically, the heat conduction was insulated from the sensing heater to the substrate by controlling both sensing and guarding heaters working at the same temperature, resulting in a higher sensitivity. The experiment and simulation results showed that the sensitivity of the dual-layer hot film sensor was significantly improved in comparison to the single-layer sensor. Additionally, the dual-layer sensor was designed and fabricated in an integrated, flexible, and miniaturized manner. Its small size makes it an excellent candidate for flow detection. |
| first_indexed | 2024-03-10T14:41:37Z |
| format | Article |
| id | doaj.art-0c8ac0b8c1a64c61964a2c964047dcb0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T14:41:37Z |
| publishDate | 2020-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-0c8ac0b8c1a64c61964a2c964047dcb02023-11-20T21:43:45ZengMDPI AGSensors1424-82202020-11-012022665710.3390/s20226657Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating StructuresYu-Chao Yan0Cheng-Yu Jiang1Run-Bo Chen2Bing-He Ma3Jin-Jun Deng4Shao-Jun Zheng5Jian Luo6Key Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaKey Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, ChinaHot film sensors detect the flow shear stress based on the forced convection heat transfer to the fluid. Current hot film sensors have been significantly hindered by the relatively low sensitivity due to the massive heat conduction to the substrate. This paper describes the design, fabrication, simulation, and testing of a novel flow sensor with dual-layer hot film structures. More specifically, the heat conduction was insulated from the sensing heater to the substrate by controlling both sensing and guarding heaters working at the same temperature, resulting in a higher sensitivity. The experiment and simulation results showed that the sensitivity of the dual-layer hot film sensor was significantly improved in comparison to the single-layer sensor. Additionally, the dual-layer sensor was designed and fabricated in an integrated, flexible, and miniaturized manner. Its small size makes it an excellent candidate for flow detection.https://www.mdpi.com/1424-8220/20/22/6657dual-layer structurehot filmheat conduction insulationflow shear stress |
| spellingShingle | Yu-Chao Yan Cheng-Yu Jiang Run-Bo Chen Bing-He Ma Jin-Jun Deng Shao-Jun Zheng Jian Luo Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures Sensors dual-layer structure hot film heat conduction insulation flow shear stress |
| title | Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures |
| title_full | Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures |
| title_fullStr | Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures |
| title_full_unstemmed | Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures |
| title_short | Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures |
| title_sort | highly sensitive flow sensor based on flexible dual layer heating structures |
| topic | dual-layer structure hot film heat conduction insulation flow shear stress |
| url | https://www.mdpi.com/1424-8220/20/22/6657 |
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