A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness...

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Bibliographic Details
Main Authors: Yuta Nagasaka, Alessia Baronchelli, Shuji Tanaka, Takashiro Tsukamoto
Format: Article
Language:English
Published: MDPI AG 2024-06-01
Series:Sensors
Subjects:
MEMS resonator
mode localization
sensitivity tuning
Online Access:https://www.mdpi.com/1424-8220/24/13/4038

Internet

https://www.mdpi.com/1424-8220/24/13/4038

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