One-Step Femtosecond Laser Irradiation of Single-Crystal Silicon: Evolution of Micro-Nano Structures and Damage Investigation

One-Step Femtosecond Laser Irradiation of Single-Crystal Silicon: Evolution of Micro-Nano Structures and Damage Investigation

As a pillar material of semiconductors, single-crystal silicon (Si) has attracted much attention due to its excellent electronic properties. Meanwhile, femtosecond laser processing as a convenient fabrication method for miniaturized structures provides an effective way to improve the performance of...

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Bibliographic Details
Main Authors: Yanan Liu, Ye Ding, Jichang Xie, Liangliang Xu, In Wha Jeong, Lijun Yang
Format: Article
Language:English
Published: Elsevier 2023-01-01
Series:Materials & Design
Subjects:
Femtosecond laser
Single-crystal silicon
Surface morphology
Subsurface damage
Nanomechanical property
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127522010668

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