Near-infrared emission in Er:ZnO thin films with embedded Si nanoparticles synthesized by ion implantation

Near-infrared emission in Er:ZnO thin films with embedded Si nanoparticles synthesized by ion implantation

Er-doped ZnO thin films on a SiO _2 /Si substrate were fabricated by radio frequency magnetron sputtering, in which embedded Si nanoparticles (NPs) were formed by ion implantation and subsequent thermal annealing. The effects of Si NPs on the Er photoluminescence (PL) at 1.54 μ m were investigated....

Full description

Bibliographic Details
Main Authors: Kaikai Li, Shuang Yu, Changsheng Ma, Fei Lu, Kaijing Liu, Yuhang Xu, Changdong Ma
Format: Article
Language:English
Published: IOP Publishing 2020-01-01
Series:Materials Research Express
Subjects:
silicon nanoparticles
ion implantation
photoluminescence
zinc oxide
thin film
Online Access:https://doi.org/10.1088/2053-1591/ab9858

Similar Items

Similar Items