Microstructure cantilever beam for current measurement
Most microelectromechanical systems (MEMS) sensors are based on the microcantilever technology, which uses a broad range of design materials and structures. The benefit ofMEMStechnology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. A...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Academy of Science of South Africa
2010-01-01
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| Series: | South African Journal of Science |
| Online Access: | https://www.sajs.co.za/article/view/10283 |