The Development of the Differential MEMS Vector Hydrophone

The Development of the Differential MEMS Vector Hydrophone

To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical an...

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Bibliographic Details
Main Authors: Guojun Zhang, Mengran Liu, Nixin Shen, Xubo Wang, Wendong Zhang
Format: Article
Language:English
Published: MDPI AG 2017-06-01
Series:Sensors
Subjects:
MEMS
hydrophone
sensitivity
acceleration sensitivity
Online Access:http://www.mdpi.com/1424-8220/17/6/1332

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